Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

Photonic Integrated Circuits (PICs) benefit from the technology advances in semiconductor industry to incorporate an ever-increasing number of photonic components on a single chip create large-scale integrated circuits. We here present broadband, compact and low-loss Silicon MEMS switch based Single-Pole Double-Throw (SPDT) architecture, where curved electrostatic actuators mechanically displace movable input waveguide redirect optical signal efficiently either two output waveguides. The has been fabricated established silicon photonics platform with custom release post-processing. With footprint 65 × xmlns:xlink="http://www.w3.org/1999/xlink">62 μ xmlns:xlink="http://www.w3.org/1999/xlink">m 2 , exhibits extinction ratio exceeding 23 dB over 70 nm bandwidth, low insertion loss fast response time below 1 μs, meeting requirements for integration reconfigurable Circuits. [2020-0391]